JPH0522266Y2 - - Google Patents
Info
- Publication number
- JPH0522266Y2 JPH0522266Y2 JP1988076916U JP7691688U JPH0522266Y2 JP H0522266 Y2 JPH0522266 Y2 JP H0522266Y2 JP 1988076916 U JP1988076916 U JP 1988076916U JP 7691688 U JP7691688 U JP 7691688U JP H0522266 Y2 JPH0522266 Y2 JP H0522266Y2
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- booth
- air
- gap
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988076916U JPH0522266Y2 (en]) | 1988-06-09 | 1988-06-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988076916U JPH0522266Y2 (en]) | 1988-06-09 | 1988-06-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH021240U JPH021240U (en]) | 1990-01-08 |
JPH0522266Y2 true JPH0522266Y2 (en]) | 1993-06-08 |
Family
ID=31301921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988076916U Expired - Lifetime JPH0522266Y2 (en]) | 1988-06-09 | 1988-06-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0522266Y2 (en]) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4549304B2 (ja) * | 2006-03-10 | 2010-09-22 | 日本スピンドル製造株式会社 | ブース |
JP7558720B2 (ja) * | 2020-08-26 | 2024-10-01 | 日本無機株式会社 | ブース組立ユニット |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01120036U (en]) * | 1988-02-02 | 1989-08-15 |
-
1988
- 1988-06-09 JP JP1988076916U patent/JPH0522266Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH021240U (en]) | 1990-01-08 |