JPH0522266Y2 - - Google Patents

Info

Publication number
JPH0522266Y2
JPH0522266Y2 JP1988076916U JP7691688U JPH0522266Y2 JP H0522266 Y2 JPH0522266 Y2 JP H0522266Y2 JP 1988076916 U JP1988076916 U JP 1988076916U JP 7691688 U JP7691688 U JP 7691688U JP H0522266 Y2 JPH0522266 Y2 JP H0522266Y2
Authority
JP
Japan
Prior art keywords
membrane
booth
air
gap
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988076916U
Other languages
English (en)
Japanese (ja)
Other versions
JPH021240U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988076916U priority Critical patent/JPH0522266Y2/ja
Publication of JPH021240U publication Critical patent/JPH021240U/ja
Application granted granted Critical
Publication of JPH0522266Y2 publication Critical patent/JPH0522266Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP1988076916U 1988-06-09 1988-06-09 Expired - Lifetime JPH0522266Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988076916U JPH0522266Y2 (en]) 1988-06-09 1988-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988076916U JPH0522266Y2 (en]) 1988-06-09 1988-06-09

Publications (2)

Publication Number Publication Date
JPH021240U JPH021240U (en]) 1990-01-08
JPH0522266Y2 true JPH0522266Y2 (en]) 1993-06-08

Family

ID=31301921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988076916U Expired - Lifetime JPH0522266Y2 (en]) 1988-06-09 1988-06-09

Country Status (1)

Country Link
JP (1) JPH0522266Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4549304B2 (ja) * 2006-03-10 2010-09-22 日本スピンドル製造株式会社 ブース
JP7558720B2 (ja) * 2020-08-26 2024-10-01 日本無機株式会社 ブース組立ユニット

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120036U (en]) * 1988-02-02 1989-08-15

Also Published As

Publication number Publication date
JPH021240U (en]) 1990-01-08

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